各種SIMS標準試料の販売及び イオン注入サービス
仕様：SiNx Ion Implant Reference Materials
■ Basic Single Element Implants
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 11B | 80 | 1x1014 |
| 12C | 100 | 1x1015 |
| 18O | 100 | 5x1014 |
| 19F | 100 | 1x1014 |
| 23Na | 150 | 1x1014 |
| 24Mg | 150 | 1x1014 |
| 27Al | 150 | 1x1014 |
| 31P | 150 | 1x1014 |
| 34S | 150 | 1x1014 |
| 35Cl | 150 | 5x1014 |
| 39K | 200 | 1x1014 |
| 40Ar | 200 | 5x1015 |
| 40Ca | 200 | 1x1014 |
| 50Ti | 200 | 1x1014 |
| 54Fe | 200 | 1x1014 |
| 59Co | 200 | 1x1014 |
| 60Ni | 200 | 1x1014 |
| 65Cu | 200 | 1x1014 |
| 64Zn | 200 | 1x1014 |
| 75As | 250 | 1x1014 |
| 79Br | 250 | 1x1014 |
| 98Mo | 250 | 1x1014 |
| 120Sn | 300 | 1x1014 |
| 123Sb | 300 | 1x1014 |
| 181Ta | 400 | 1x1014 |
| 184W | 400 | 1x1014 |
| 195Pt | 400 | 1x1014 |
| 197Au | 400 | 1x1014 |
■ SiNx Bulk Doped Reference Materials
| Species | Nominal Energy (keV) |
|---|---|
| H | 4.2 atomic % |
SiNx ion implant reference materials are 1.6 cm x 1.6 cm
