各種SIMS標準試料の販売及び イオン注入サービス
仕様：GaAs Ion Implant Reference Materials
■ Basic Single Element Implants
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 1H | 30 | 2x1015 |
| 2H | 50 | 1x1015 |
| 9Be | 100 | 1x1014 |
| 11B | 100 | 1x1014 |
| 12C | 100 | 1x1015 |
| 14N | 100 | 1x1015 |
| 13O | 100 | 5x1014 |
| 19F | 100 | 1x1014 |
| 20Na | 150 | 1x1014 |
| 24Mg | 260 | 1x1014 |
| 27Al | 260 | 1x1014 |
| 29Si | 260 | 1x1014 |
| 34S | 300 | 1x1014 |
| 35Cl | 200 | 1x1014 |
| 40Ca | 200 | 1x1014 |
| 52Cr | 300 | 1x1014 |
| 55Mn | 300 | 1x1014 |
| 54Fe | 300 | 1x1014 |
| 60Ni | 200 | 1x1014 |
| 65Cu | 200 | 1x1014 |
| 64Zn | 300 | 1x1014 |
| 79Br | 250 | 1x1014 |
| 80Se | 600 | 1x1014 |
| Cd (110Cd – 116Cd) | 600 | 4x1014 |
| 115In | 600 | 1x1014 |
| 120Sn | 600 | 1x1014 |
| 130Te | 600 | 1x1014 |
| 195Pt | 400 | 1x1014 |
| 197Au | 400 | 1x1014 |
GaAs ion implant reference materials are 0.5” x 0.5” or 1.5 cm x 1.5 cm
